| 摘要 |
It is an object to provide a semiconductor device having a copper wiring structure in which a copper diffusion preventing capability of a silicon carbide film can be improved and a lifetime maintained until a dielectric breakdown caused by copper diffusion can be increased, and furthermore, a method of manufacturing the semiconductor device. A first copper diffusion preventive film (8) is provided between a first copper wiring (7) and a second low permittivity interlayer insulating film (9). A silicon carbide film containing oxygen atoms or the oxygen atoms and nitrogen atoms in 30 atomic % or more is employed for the first copper diffusion preventive film (8). By employing such a silicon carbide film, a copper diffusion preventing function can be improved and a lifetime maintained until a dielectric breakdown caused by the copper diffusion can be increased.
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