发明名称 Method of producing an integrated reference pressure sensor element
摘要 A method of manufacturing a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated body, maintaining the exterior heated body in direct contact with the getter for a predetermined period of time, and removing the exterior heated body.
申请公布号 US6735845(B2) 申请公布日期 2004.05.18
申请号 US19990377833 申请日期 1999.08.20
申请人 MKS INSTRUMENTS INC. 发明人 JONSSON STAFFAN
分类号 G01L7/08;G01L9/00;(IPC1-7):G01R3/00;H01G7/00 主分类号 G01L7/08
代理机构 代理人
主权项
地址