| 摘要 |
<p>PURPOSE:To improve an yield in the manufacture of a field emission cathode device and increase the lifetime thereof by preventing the occurrence of shortcircuit between a cathode electrode and a gate electrode. CONSTITUTION:A field emission cathode device in the title comprises the first electrode 11 for applying voltage to a plurality of cathodes 9, a resistance layer 12, an insulation layer 2 and the second electrode 3, respectively laminated in sequence, and a cavity 6 is formed over the range of the second electrode 3 and insulation layer 2. Furthermore, the cathodes 9 are so laid in the cavity 6 as to be adjacent to the top of the resistance layer 12, and the first electrode 11 is made to have a break beneath the cathodes 9.</p> |
