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发明名称
摘要
申请公布号	JP3528166(B2)	申请公布日期	2004.05.17
申请号	JP19980256506	申请日期	1998.09.10
申请人		发明人
分类号	B24B1/00;H01L21/304;(IPC1-7):H01L21/304	主分类号	B24B1/00
代理机构		代理人
主权项
地址

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