摘要 |
PROBLEM TO BE SOLVED: To obtain an actuator unit which can be manufactured by a relatively simple process and is highly durable. SOLUTION: Columnar electrodes 17a-17d are buried in a piezoelectric actuator plate 6a. The length in an axial direction of the electrodes 17a-17d is slightly shorter than half of the thickness of the piezoelectric actuator plate 6a, and the electrodes 17a-17d do not penetrate the piezoelectric actuator plate 6a. The piezoelectric actuator plate 6a is polarized in its direction of plane. When the electrodes 17a and 17c become a positive predetermined potential, an electric field is applied in the direction of plane of the piezoelectric actuator plate 6a, whereby the actuator unit 6 including the piezoelectric actuator plate 6a curves to expand upward because of an elongation difference in the direction of plane between the upper side where the electrodes 17a-17d are arranged and the lower side without the electrodes. COPYRIGHT: (C)2004,JPO
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