| 发明名称 |
Electronic device and method for fabricating the same |
| 摘要 |
A hole is formed in an insulating film containing silicon and carbon. The insulating film has a density or a carbon concentration varying gradually in the direction of the thickness thereof.
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| 申请公布号 |
US2004089924(A1) |
申请公布日期 |
2004.05.13 |
| 申请号 |
US20030621638 |
申请日期 |
2003.07.18 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
YUASA HIROSHI;SATAKE TETSUO;MATSUURA MASAZUMI;GOTO KINYA |
| 分类号 |
H01L21/312;H01L21/316;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L23/495 |
主分类号 |
H01L21/312 |
| 代理机构 |
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代理人 |
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