Semiconductor wafer aligment device has reception plane of alignment table lying within periphery of semiconductor wafer for preventing damage by contact with table edge

摘要

The alignment device (10) has a table (11) which rotates in a plane, provided with a wafer reception plane (12A) and displaced along orthogonal axes via a displacement mechanism (30), with a sensor (50) detecting the position of the wafer edge. The reception plane lies within the periphery of the wafer (W), a reception part (15) on the outside of the table lying in the same plane and having a surface which projects beyond the wafer.