| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot system which compensates the error of a half width energy value due to the tolerance of optical thin films when light passes a Fabry-Perot resonance cavity and to provide a method for manufacturing the same. SOLUTION: The Fabry-Perot system consists of a parallel light input element, such as a graded index lens, coated with the optical thin film as a first reflecting surface and a reflecting surface formed by an MEMS (Micro Electro Mechanical System) process technique as a second reflecting surface. As a result, the Fabry-Perot system is made adjustable in the distance between the first reflecting surface and the second reflecting surface and, since the distance between the two reflecting surfaces can be adjusted by the reflectivity of the optical thin films actually plated on the first reflecting surface on the graded index lens and the second reflecting surface formed by the MEMS process technique, the desired half width energy can be realized. COPYRIGHT: (C)2004,JPO
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