DLC GRADIENT STRUCTURAL HARD FILM, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a DLC (Diamond Like Carbon) gradient structural hard film excellent in adhesion to a substrate of a DLC film, and to provide its manufacturing method. SOLUTION: The DLC gradient structural hard film has a titanium-containing first layer covered on the surface of the substrate and the outer-most surface layer of the DLC film, and the ratio of at least one kind of titanium and titanium carbide to the DLC is continuously changed. In this structure, a method for evaporating titanium by an HCD method and a method for generating carbon ions by an IBAD method are jointly used, and the structure is obtained by an ion-plating method. A portion having the continuously changing structure from a Ti-TiC-C mixed zone side on the face side of the base material to the face DLC side has the thickness of 0.04-0.11μm. COPYRIGHT: (C)2004,JPO