发明名称 |
Position measuring arrangement |
摘要 |
A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that generates radiation and a signal generator that receives the radiation and generates displacement-dependent output signals that determine a relative position between a first object and a second object. A feedback device, wherein the laser light source interacts with the feedback device in such a way that an excitation of several modes takes place in the single-mode laser light source, and a multi-mode operation of the single-mode laser light source results.
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申请公布号 |
US2004090636(A1) |
申请公布日期 |
2004.05.13 |
申请号 |
US20030632536 |
申请日期 |
2003.08.01 |
申请人 |
HOLZAPFEL WOLFGANG;LINNEMANN UDO |
发明人 |
HOLZAPFEL WOLFGANG;LINNEMANN UDO |
分类号 |
G01B11/00;G01B9/02;G01D5/26;G01D5/347;G01D5/36;G01D5/38;H01L31/12;H01S5/14;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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