发明名称 Position measuring arrangement
摘要 A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that generates radiation and a signal generator that receives the radiation and generates displacement-dependent output signals that determine a relative position between a first object and a second object. A feedback device, wherein the laser light source interacts with the feedback device in such a way that an excitation of several modes takes place in the single-mode laser light source, and a multi-mode operation of the single-mode laser light source results.
申请公布号 US2004090636(A1) 申请公布日期 2004.05.13
申请号 US20030632536 申请日期 2003.08.01
申请人 HOLZAPFEL WOLFGANG;LINNEMANN UDO 发明人 HOLZAPFEL WOLFGANG;LINNEMANN UDO
分类号 G01B11/00;G01B9/02;G01D5/26;G01D5/347;G01D5/36;G01D5/38;H01L31/12;H01S5/14;(IPC1-7):G01B9/02 主分类号 G01B11/00
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