METHOD AND SYSTEM FOR MAKING UNIFORM HIGH FREQUENCY PLASMA OVER LARGER AREA IN PLASMA-ACTIVATED CVD SYSTEM

摘要

A system for making uniform the plasma generating conditions over a large area in a plasma-activated CVD system utilizing very high frequency (VHF). The system comprises first and second power supply sections disposed at the opposite end parts of a discharge electrode in the plasma-activated CVD system, wherein a cycle for supplying high frequency power of the same frequency and a cycle for supplying high frequency power of different frequency are conducted alternately at the first and second power supply sections such that the plasma generating conditions become uniform over a large area when viewed on time average due to plasma of different generating conditions in each cycle.