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经营范围
发明名称
Ätzverfahren, seine Anwendung und Ätzmittel
摘要
申请公布号
DE10026030(B4)
申请公布日期
2004.05.13
申请号
DE20001026030
申请日期
2000.05.25
申请人
SOLVAY FLUOR UND DERIVATE GMBH
发明人
BUEGLER, JUERGEN H.;BRAUN, MAX;BROSCH, CARSTEN
分类号
C03C15/00;C09K13/08;H01L21/311;(IPC1-7):C23F1/16;C23F1/44;H01L21/302
主分类号
C03C15/00
代理机构
代理人
主权项
地址
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