A reticle 100 includes two or more image patterns for different layers of an integrated circuit, each one in a separate image field 110 - 120. These image layers are used in the production of the same integrated circuit. By placing multiple image layers on the same reticle, fewer reticles need to be produced and a prototype circuit can then be made more cheaply. Likewise the reduced set of reticles can be used where there is a limited run of circuits. If any or all reticle layers need to be replaced, then the replacement set is also cheaper.
申请公布号
WO2004040373(A1)
申请公布日期
2004.05.13
申请号
WO2003SG00254
申请日期
2003.10.30
申请人
SYSTEMS ON SILICON MANUFACTURING CO. PTE. LTD.;BOUCHE, ERIC;CORBOY, SCOTT;WONG, CHEE YOONG, LAWRENCE
发明人
BOUCHE, ERIC;CORBOY, SCOTT;WONG, CHEE YOONG, LAWRENCE