MULTI-IMAGE RETICLES

摘要

A reticle 100 includes two or more image patterns for different layers of an integrated circuit, each one in a separate image field 110 -120. These image layers are used in the production of the same integrated circuit. By placing multiple image layers on the same reticle, fewer reticles need to be produced and a prototype circuit can then be made more cheaply. Likewise the reduced set of reticles can be used where there is a limited run of circuits. If any or all reticle layers need to be replaced, then the replacement set is also cheaper.