| 摘要 |
A module for use in a process tool is disclosed. The module comprising an enclosure for housing a device to be tested; and a frame coupled to the enclosure. The frame includes a standard interface to the process tool and a kinematic interface to the enclosure to facilitate repeatable and high accuracy docking of the enclosure. These could be inspection components, measurement devices or other forms of instrumentation that are used for gathering information and/or analyzing data. The equipment could be used for, but not limited to, the fabrication of substrates, including semiconductor devices, reticles, and other products. |
