| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic electroluminescent element allowing efficient formation of stacked layers of organic and inorganic films, and a plasma treatment apparatus used for the same. <P>SOLUTION: Upon introduction of Ar and methyl methacrylate into a treatment chamber 31, a high frequency power of 100 W is applied to a target 20 by a high frequency power supply 35. A stress releasing layer of polymethyl methacrylate is thereby formed on a substrate 10 for film formation. When the formation of the stress releasing layer is completed, the amount of introduction of methyl methacrylate into the treatment chamber 31 is gradually decreased while N<SB>2</SB>is introduced into the treatment chamber 31 and the amount of introduction thereof is gradually increased. At the same time, the high frequency power is switched from 100 W to 1000 W, and this high frequency power of 1000 W is applied to the target 20 of Si. A gas barrier layer of Si<SB>3</SB>N<SB>4</SB>is thereby formed on the stress releasing layer. <P>COPYRIGHT: (C)2004,JPO |
