发明名称 WATER-JET MACHINING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a water-jet machining device which discharges machining water having abrasive grains mixed therein from a nozzle after stopping a machining work, to thereby prevent clogging of spray hole with the abrasive grain. SOLUTION: The water-jet machining device is formed of a workpiece holding mechanism for holding a workpiece, the nozzle for spraying water jet to the workpiece held by the workpiece holding mechanism, and a machining water feeding means for feeding high-pressure machining water having the abrasive grains mixed therein, to the nozzle. The water-jet machining device is comprised of a clean water feeding means for feeding clean water to the nozzle. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004136397(A) 申请公布日期 2004.05.13
申请号 JP20020303005 申请日期 2002.10.17
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 B24C9/00;B05B7/04;B24B3/22;H01L21/301;(IPC1-7):B24C9/00 主分类号 B24C9/00
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