| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser interferometer having an input/output section for inputting/outputting laser beams in an axial direction freely. SOLUTION: A laser interference section 3 in the laser interferometer 1 comprises a polarization beam splitter 8 for dispersing P waves in a straight advance direction and S waves at right angles for outputting, a turning mirror 9 that is arranged at right angles to the polarization beam splitter 8, a cube corner prism 11 that is arranged at the opposite side of the polarization beam splitter 8 with respect to the turning mirror 9, a 1/4 wavelength board arranged between the polarization beam splitter 8 and the cube corner prism 11, a biprism 6 arranged between the polarization beam splitter 8 and the turning mirror 9/reflector 2, and a 1/4 wavelength board arranged between the polarization beam splitter 8 and the turning mirror 9/reflector 2, An input/output section 8a of the polarization beam splitter 8 for freely inputting/outputting laser beams is positioned at an opposite side in the direction of the Z axis of the laser interference section 3 with respect to the reflector 2. COPYRIGHT: (C)2004,JPO
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