| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head formed by anisotropically etching a Si substrate in which thickness accuracy of a vibrating plate is improved and discharge stability is increased, so that stable high-quality printing is realized. SOLUTION: The Si substrate 41 on which a boron-doped layer 46 is formed and an oxide film 42 is patterned is etched with a 35wt% aqueous potassium hydroxide solution to a depth just before reaching the boron-doped layer 46. Then, the etching is continued with a 5wt% aqueous potassium hydroxide solution before stopping the etching. The etching is further continued to a predetermined thickness of the vibrating plate. By this method, the surface roughening of an etching surface 81 until the etching stop is suppressed and the surface roughness is reduced by an additional etching from an etching stop surface 82. The above effect further reduces the surface roughness of an etching surface 83 and allows the thickness accuracy of the vibrating plate 5 to be 2±0.025μm. COPYRIGHT: (C)2004,JPO
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