| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum hot pressing device in which a pressurizing mechanism is simplified, heating-cooling treatment can efficiently be performed in a short time, and the measurement of an actual temperature can easily be performed. SOLUTION: In the vacuum hot pressing device, an upper pressurizing member composing an upper boundary face capable of upward and downward movement in vacuum chambers 5 and 6 applies pressure caused by a difference in atmospheric pressure between the outside thereof and the upper boundary face. An upper heater 3 provided on the upper boundary face of the upper pressurizing member 1 applies heat caused by the heat generation thereof on the object 100 to be worked from the upper face. A lower pressurizing member composing the fixed lower boundary face in the vacuum chambers receives the pressure applied to the object to be worked by the upper pressurizing member. A lower heater provided on the lower boundary face of the lower pressurizing member 2 applies heat caused by the heat generation thereof to the object to be worked from the lower face. COPYRIGHT: (C)2004,JPO
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