METHOD FOR ANALYZING STATE IN CARBON FILM

摘要

PROBLEM TO BE SOLVED: To provide a convenient and rapid method for analyzing a state in a carbon film which quantitatively evaluates a bonding state of carbon atoms by using an XPS method.

SOLUTION: A C1s spectrum of an XPS obtained without radiation of an ion beam such as Ar etc. to a sample surface before and during an analysis is removed in the background. A second order differential of the obtained spectrum is found. Local minimums of the second order differential are determined as peak energies of sp3-C (a high energy side) and sp2-C (a low energy side). A peak shape of the sp2-C is considered as a graphite shape and a peak shape of the sp3-C is considered as a shape having a Gauss-Lorentz distribution. They are fitted by peak heights and half bandwidths. A composition ratio of the sp3-C and the sp2-C is calculated from an area ratio of two obtained peaks.

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