发明名称 |
Reticle manipulating device |
摘要 |
A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.
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申请公布号 |
US2004091341(A1) |
申请公布日期 |
2004.05.13 |
申请号 |
US20030628980 |
申请日期 |
2003.07.29 |
申请人 |
BLATTNER JAKOB;FEDERICI RUDY;FOSNIGHT WILLIAM;HARIS CLINT |
发明人 |
BLATTNER JAKOB;FEDERICI RUDY;FOSNIGHT WILLIAM;HARIS CLINT |
分类号 |
B65G1/00;B65G49/07;G03F7/20;G06F7/00;H01L;(IPC1-7):B65G1/00 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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