发明名称 |
Design of hardware features to facilitate arc-spray coating applications and functions |
摘要 |
A method and apparatus for forming a coating on a sputter chamber workpiece. The apparatus generally includes a sputter chamber having at least one workpiece. The at least one workpiece generally includes one or more trenches formed therein, the trenches being configured to define an arc spray coating region. The method generally includes forming one or more trenches in the workpiece, the trenches defining a coating region and applying a metal coating to the coating region by arc spraying.
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申请公布号 |
US2004089542(A1) |
申请公布日期 |
2004.05.13 |
申请号 |
US20020293641 |
申请日期 |
2002.11.12 |
申请人 |
APPLIED MATERIALS,INC. |
发明人 |
LIU ALAN BARRY;TZOU CHIEN-SHIUNG;TSUNG JAMES |
分类号 |
C23C14/00;C23C4/00;C23C4/02;C23C14/34;C23C14/50;C23C14/56;(IPC1-7):C23C14/32;C23C4/08 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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