PROCESS FOR PRODUCING POLYCRYSTALLINE FILM USING LASER AND POLYCRYSTALLINE FILM

摘要

An object to be processed having a thin film of an amorphous material formed on the surface thereof is provided. The thin film is fused by projecting a pulse laser beam having cross-section elongated in one direction to the surface thereof and then the thin film is solidified. Crystal grains are generated continuously in the direction of the long axis within a first stripe region extending in the direction of the long axis and spaced apart by some distance from the edge and the central axis out of regions between an edge extending in the direction of the long axis and the center line of the beam incident region.