DEFECT ANALYZING DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUITS, SYSTEM THEREFOR, AND DETECTION METHOD

摘要

Analyses of defects of semiconductor integrated circuits are performed by a simplified analyzing device. Simplified defect analysis operations are realized. A defect analyzing device for semiconductor integrated circuits, wherein a probe is used to irradiate an electromagnetic field to activate open gates or gate potentials, thereby detecting electrical characteristic variations, such as a power supply current variation, in a semiconductor integrated circuit so as to determine whether any defects exist therein.