| 摘要 |
PROBLEM TO BE SOLVED: To provide a connecting interposer where the lowering of a source voltage is not caused in a power source line, and electrical signals of correct high frequency can be transmitted in a signal line, in an inspection system. SOLUTION: The connecting interposer for conductively connecting the corresponding electrodes to each other from both sides, which is interposed between two substrates having a plurality of electrodes, comprises a conductive support 11 having the same potential as the ground potential, where through holes 10 are formed and disposed, and a connector 12 inserted into the hole 10 and having connecting terminals 13 at both sides, and which is insulated from the support 11. By changing and adjusting at least any one parameter of the diameter R of the hole of the support 11, the diameter r of wire of the connector, or the dielectric constantεof dielectrics either in the power source line or the signal line, the interposer is constituted so that the impedance of the connector is made to set with a low impedance in the power source line and made impedance matching in the signal line. COPYRIGHT: (C)2004,JPO
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