| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit testing device and a test method enabling an operator to easily grasp the test state of each lot even if a semiconductor integrated circuit of a different lot is arranged in a furnace of a thermostat used when performing a burn-in test, capable of shortening furthermore a time required for the test, and hereby capable of reducing a manufacturing cost of the semiconductor integrated circuit. SOLUTION: A plurality of racks are provided in the furnace 12, and a DUT included in the same lot is arranged on one rack but a DUT included in a different lot can be arranged on a different rack. The arrangement state and the test state of a lot in the furnace 12 are displayed relative to each rack on a display part 23. COPYRIGHT: (C)2004,JPO
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