| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation means with a high resolution of a nanometer scale capable of imaging an organic material without performing a special pretreatment such as dyeing with a heavy metal or introduction of a fluorescent material, and identifying chemical species even for a material containing a plurality of chemical species to image the structure. SOLUTION: In a conventional nearfield optical microscope, observation can be performed in the nanometer scale, but not performed particularly in a deep ultraviolet area where the organic material emits self-fluorescence. In order to enable the observation in the deep ultraviolet area, all optical parts for passing excitation light and signal light is made of pure quartz or fluorite. COPYRIGHT: (C)2004,JPO
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