| 摘要 |
PROBLEM TO BE SOLVED: To provide a narrow-band laser apparatus capable of oscillating laser beams having a beam width equal to or wider than a prescribed value and having a narrow spectrum line width. SOLUTION: The narrow-band laser apparatus which oscillates outgoing narrow-band laser beams 21C is provided with a monitor module 37 for monitoring the optical characteristic of the outgoing laser beams 21C, and a beam expander 35 for expanding the beam width of the outgoing laser beams 21C between a front mirror 16 and the monitor module 37. The beam expander 35 is constituted by combining a plurality of prisms 39, 40, a plurality of lenses 43, 44, a plurality of curved mirrors 45 and 46, or combining the prism 39 and mirrors 41 and 42. COPYRIGHT: (C)2004,JPO |
