发明名称 |
Particle beam processing apparatus and materials treatable using the apparatus |
摘要 |
Methods, and materials made by the methods, are provided herein for treating materials with a particle beam processing device. According to one illustrative embodiment, a method for treating a material with a particle beam processing device is provided that includes: providing a particle beam generating assembly including at least one filament for creating a plurality of particles; applying an operating voltage greater than about 110 kV to the filament to create the plurality of particles; causing the plurality of particles to pass through a thin foil having a thickness of about 10 microns or less; and treating a material with the plurality of particles. |
申请公布号 |
US2004089820(A1) |
申请公布日期 |
2004.05.13 |
申请号 |
US20030631678 |
申请日期 |
2003.07.31 |
申请人 |
RANGWALLA IMTIAZ;CLOUGH HARVEY;HANNAFIN GEORGE |
发明人 |
RANGWALLA IMTIAZ;CLOUGH HARVEY;HANNAFIN GEORGE |
分类号 |
B05D3/06;G21K5/10;H01J33/00;(IPC1-7):H01J33/00 |
主分类号 |
B05D3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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