发明名称 |
VACUUM PUMP AND STARTING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which is normally started even when the rotation of a pump rotor is prevented by products or the like solidified or liquefied in a casing, and a starting method therefor. SOLUTION: The vacuum pump comprising pump rotors 1 and 1 rotatably disposed in a casing 2 and a motor 3 to rotate the pump rotors 1 and 1 further comprises a pump rotor control unit 15 to rotate the pump rotors 1 and 1 in the forward direction or the reverse direction along a predetermined pattern when the vacuum pump is started. COPYRIGHT: (C)2004,JPO
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申请公布号 |
JP2004138047(A) |
申请公布日期 |
2004.05.13 |
申请号 |
JP20030207832 |
申请日期 |
2003.08.19 |
申请人 |
EBARA CORP;EBARA DENSAN LTD |
发明人 |
IIJIMA NAOKI;WATANABE JIRO;CHINO HIROYUKI;YANAGISAWA SEIJI;KAWAMURA TAKESHI |
分类号 |
F04C28/06;F04C25/02;(IPC1-7):F04C29/10 |
主分类号 |
F04C28/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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