发明名称 METHOD FOR PRODUCING A TRANSISTOR STRUCTURE
摘要 The invention relates to a method for producing a transistor structure, comprised of at least one first and one second bipolar transistor with different collector widths. The invention is characterized in that all junctions between differently doped regions have a sharp interface. A first collector region (2.1) is suited for use in a high-frequency transistor having high limit frequencies fT, and a second collector region (2.2) is suited for use in a high-voltage transistor having increased breakdown voltages.
申请公布号 WO2004040643(A1) 申请公布日期 2004.05.13
申请号 WO2003DE03552 申请日期 2003.10.24
申请人 INFINEON TECHNOLOGIES AG;BOECK, JOSEF;LACHNER, RUDOLF;MEISTER, THOMAS;SCHAEFER, HERBERT;SECK, MARTIN;STENGL, REINHARD 发明人 BOECK, JOSEF;LACHNER, RUDOLF;MEISTER, THOMAS;SCHAEFER, HERBERT;SECK, MARTIN;STENGL, REINHARD
分类号 H01L21/331;H01L21/8222;H01L27/082;H01L29/08 主分类号 H01L21/331
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