MICROMACHINED ULTRASONIC TRANSDUCERS AND METHOD OF FABRICATION
摘要
There is described a micromachined ultrasonic transducers (MUTS) and a method of fabrication. The membranes of the transducers are fusion bonded to cavities to form cells. The membranes are formed on a wafer (11) of sacrificial material. This permits handling for fusions bonding. The sacrificial material is then removed to leave the membrane (14). Membranes of silicon, silicon nitride, etc. can be formed on the sacrificial material. Also described are cMUTs, pMUTs and mMUTs.
申请公布号
WO2004016036(A3)
申请公布日期
2004.05.13
申请号
WO2003US24777
申请日期
2003.08.08
申请人
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY;KHURI-YAKUB, BUTRUS, T.;HUANG, YONGLI;ERGUN, ARIF, S.
发明人
KHURI-YAKUB, BUTRUS, T.;HUANG, YONGLI;ERGUN, ARIF, S.