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发明名称
VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERVORRICHTUNG
摘要
申请公布号
DE69722661(T2)
申请公布日期
2004.05.13
申请号
DE1997622661T
申请日期
1997.03.05
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
SHIRAISHI, TSUKASA;BESSHO, YOSHIHIRO
分类号
H01L21/56;H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/56
代理机构
代理人
主权项
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