发明名称 GATE VALVE ASSEMBLY
摘要 A gate valve assembly includes a valve seat and a valve. The valve seat includes a passage opening and a contacting region surrounding the passage opening. The valve includes a groove located on a marginal region of the valve, and a sealing body positioned in the groove. The passage opening is closed by covering the valve over the valve seat, and an upper surface of the sealing body is tightly contacted with the contacting region. Therefore, the valve is prevented from rubbing against the valve seat and producing particles.
申请公布号 US2004089836(A1) 申请公布日期 2004.05.13
申请号 US20030249175 申请日期 2003.03.20
申请人 WU WEI-YUEH 发明人 WU WEI-YUEH
分类号 C23C16/44;F16K3/02;H01L21/205;H01L21/677;(IPC1-7):F16K1/00 主分类号 C23C16/44
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