| 摘要 |
PURPOSE: A deionized water level detecting apparatus of semiconductor manufacturing equipment is provided to check the level of deionized water without disassembling a VDS tank by using a transparent window. CONSTITUTION: A deionized water level detecting apparatus is provided with a VDS tank(10) for storing deionized water and generating H2O by heating the deionized water, and a transparent window(18) installed at the front surface of the VDS tank for checking the level of the deionized water. Preferably, a rectangle type hole is formed at the front surface of the VDS tank. Preferably, an O-ring(20) is further installed at the resultant structure for preventing the leakage of the deionized water when inserting the transparent window into the rectangle type hole. Preferably, the transparent window is made of quartz.
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