| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray microinspection apparatus that extremely quickly achieves non-destructive examination with an ultrahigh resolution and has superior functions, such as a precise electronic probe control function, a CT function, an element analysis function, and a target change function. <P>SOLUTION: The X-ray microinspection apparatus comprises a magnetic field superimposition lens, where a magnetic field generation section is arranged near an electron generation section; a reflection electron detection means that is arranged near a target for X-ray generation and detects a reflection electron from the target for X-ray generation of an electron probe formed via the magnetic field superimposition lens; and an electron image creation means for imaging an electronic image on the surface of the target for X-ray generation, based on the detection signal of the reflection electron detection means. The X-ray microinspection apparatus can perform focus adjustment to the target for X-ray generation of the electronic probe and adjustment including astigmatism correction, based on the image information of the electronic image. Additionally, the X-ray microinspection apparatus mounts the electronic probe control function, an electronic beam axis alignment function, the CT function, the element analysis function, the target change function, and the like. <P>COPYRIGHT: (C)2004,JPO</p> |
