| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray microinspection apparatus that extremely quickly enables non-destructive inspection with a high resolution of 0.1μm or less and is capable of greatly contributing to the field of nanotechnology. <P>SOLUTION: In the X-ray microinspectioon apparatus that has an X-ray generation means for generating X rays by irradiating a target for X-ray generation with electron beams from an electron source and utilizes the X rays to inspect an object to be inspected, a magnetic field superimposition lens, where a magnetic field generation section is arranged near the electron generation section of an electron gun, is provided as the component of the X-ray generation means. Additionally, a liquid metal electron source using a liquid metal as the electron source or a heat field emission electron source is provided as the component of the X-ray generation means. Further, a target with a heat sink using a CVD diamond as the heat sink as the target for X-ray generation is provided as the component of the X-ray generation means. <P>COPYRIGHT: (C)2004,JPO</p> |
