发明名称 MANUFACTURING DEVICE AND METHOD OF FUSED QUARTZ JIG
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing device and a method of a fused quartz jig which prevents the degradation of quality in appearance due to debugging after temporary fastening and enables the remarkable shortening of a manufacturing time. SOLUTION: The manufacturing device of a fused quartz jig, composed of a plurality of grooved rods 6a, 6e incorporated inbetween a trestle 5 and a top plate 4 at a predetermined interval, is provided with a base board 12, a long guide member provided on the upper surface of the base board, a trestle jig unit 16 fixed to one end of the long guide member, a trestle pillow unit slidably fixed to the long guide member, a top plate jig 44 slidably fixed to the long guide member, a top plate pillow unit 34 slidably fixed to the long guide member and a grooved rod jig unit slidably fixed to the long guide member. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004140135(A) 申请公布日期 2004.05.13
申请号 JP20020302560 申请日期 2002.10.17
申请人 SHINETSU QUARTZ PROD CO LTD 发明人 KAMIMURA TERUYA;OGOSHI SHINICHI
分类号 H01L21/683;H01L21/22;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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