| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of transferring thin film device by which an object to be peeled can be peeled easily regardless of the characteristics, conditions, etc., of the object and, particularly, the object can be transferred to various types of transfer bodies. SOLUTION: The method of transferring thin film device, in which a layer to be transferred formed on a substrate through a separation layer and containing a thin film device is peeled off from the substrate and transferred to a transfer body, includes a step of disposing the transfer body on one side of the layer to be transferred opposite to the substrate and a step of transferring the layer to the transfer body by peeling off the layer from the substrate at the inside and/or interface of the separation layer. The front and rear surfaces of the layer are made equal to those when the layer is formed on the substrate by performing the transfer a plurality of times. COPYRIGHT: (C)2004,JPO
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