| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a conventional probe device can not correspond to a plurality of testers. SOLUTION: The probe device 20 is provided with a card clamp 26 capable of detachably holding a probe card 24 and connecting a POGO ring 25 only for a test head, and a head plate 27 on which the card clamp 26 is fixed. The card clamp 26 has a size capable of fitting each of exclusive POGO rings 25, 40 and 50 independently of sorts of testers and is provided with a conversion ring 30, 41, and 51 for converting POGO rings 25, 40 and 50 into connection structures of the card clamp 26. COPYRIGHT: (C)2004,JPO
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