| 摘要 |
PROBLEM TO BE SOLVED: To simplify a CNT patterning step and reduce cost by generating a carbon nanotube by a simple step to form a film on a substrate. SOLUTION: Carbon is evaporated in an inert gas atmosphere by arc discharge between a carbon-made anode 2 and a cathode 3 arranged so as to face the anode 2 and condensed to generate the carbon nanotube. Simultaneously, thus formed carbon nanotube is dispersed in an inert gas, transported together with the inert gas through a transport pipe 5, and jetted through a nozzle 10. Thus, the carbon nanotube is formed on a substrate 12 which is a film formation object. COPYRIGHT: (C)2004,JPO
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