| 摘要 |
PROBLEM TO BE SOLVED: To easily and freely arrange substrate support pins on an unused region on a substrate, to eliminate the need of a plurality of substrate supporting plates, to reduce cost and to reduce trouble of exchange in the substrate supporting device supporting a planar substrate to be processed. SOLUTION: In the substrate supporting device, an upper substrate supporting plate 3 formed of thin magnetic body is overlapped on a lower substrate supporting plate 2 formed of an aluminum metal plate so as to form the substrate supporting plate 4, and fixed substrate supporting pins 5 and the movable substrate supporting pins 6 are arranged on the plate 4. The fixed pins 5 are fixed by screws 51, and the movable pins 6 have magnets inside and are fixed to the upper substrate supporting plate 3 by magnetic force. Positions of the movable pins 6 can easily be changed without using a tool. COPYRIGHT: (C)2004,JPO |
