发明名称 |
Method and apparatus for producing an optically effective system of layers on both sides of a substrate |
摘要 |
A method and apparatus for producing an optically effective system of layers on a substrate, such as a lens for use in an optical device. A plasma supported sputter deposition process is employed which, for the purpose of reducing damage to the rear side (1b) first applies a protective layer (2) to the rear side and then applies a system of layers (3) on the front side (1a) of the substrate (1). The apparatus includes an evacuable sputter chamber and a substrate holder (5) with receiving elements (6) for the substrates, and the receiving elements are mounted to permit rotation about two mutually perpendicular axes.
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申请公布号 |
US2004089537(A1) |
申请公布日期 |
2004.05.13 |
申请号 |
US20030700996 |
申请日期 |
2003.11.04 |
申请人 |
SATIS VACUUM INDUSTRIES VERTRIEBS AG |
发明人 |
BREME FRANK |
分类号 |
C23C14/06;C23C14/08;C23C14/34;C23C14/50;C23C14/56;G02B1/10;G02B1/11;(IPC1-7):C23C14/32 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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