SOFTWARE SYNCHRONIZATION OF MULTIPLE SCANNING PROBES

摘要

A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system (130) providing drive signals to a first Atomec Force Microscope (AFM) (148a) and calculated drive signals to additional AFMs (148b and 148c) based on the first drive signals and the relative position of the additional AFMs to the first ASM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple AFMs allows for reduced time for locating FA features to set up measurements.