METHOD FOR MANUFACTURING ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for manufacturing an array substrate for a liquid crystal display is provided to form a gate wiring and a data wiring with a double layer of Cu/Mo-alloy, thereby prevent them from over etching. CONSTITUTION: A Mo-alloy layer and Cu are deposited sequentially on a substrate and they are patterned, so that a gate electrode and a gate wiring are formed. An active layer and an ohmic contact layer are positioned on an upper gate insulation film of the gate electrode. A source electrode is formed at a side of the ohmic contact layer and a drain electrode is separated to the source electrode and a data wiring is connected to the source electrode and defines a pixel region by crossing the gate wiring vertically. A protective film(220) is formed at an upper portion of the source and drain electrodes and the data wiring, and exposes a portion of the drain electrode. A transparent pixel electrode(226) is contacted with the exposed drain electrode(216) and positioned at the pixel region(P).