发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE DEFINING DIFFERENT ANTENNA STANDARDS FOR SEMICONDUCTOR DEVICES
摘要 PURPOSE: A method for manufacturing a semiconductor device is provided to define for a semiconductor device connected to a diode an antenna standard different from a standard defined for a semiconductor device which is not connected to a diode. CONSTITUTION: A plurality of semiconductor devices include gate insulation films which have different thicknesses. The semiconductor devices have different antenna standards. A first antenna standard for a first semiconductor device is set to be more flexible than a second antenna standard for the first semiconductor device. The first semiconductor device includes a gate insulating film whose thickness is smaller than a predetermined thickness. The second semiconductor device includes a gate insulating film whose thickness is greater than a predetermined thickness. The predetermined thickness is determined to allow a tunneling of charges.
申请公布号 KR20040040274(A) 申请公布日期 2004.05.12
申请号 KR20020086710 申请日期 2002.12.30
申请人 NEC ELECTRONICS CORPORATION 发明人 MINDA HIROYASU
分类号 H01L27/04;G06F17/50;H01L21/3065;H01L21/336;H01L21/66;H01L21/70;H01L21/82;H01L21/822;H01L21/8234;H01L21/8238;H01L23/544;H01L27/088;(IPC1-7):H01L21/306 主分类号 H01L27/04
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