发明名称 Method and apparatus for sintering a gel tube
摘要 Disclosed are a method and an apparatus for sintering a gel tube (310) formed by a sol-gel change. The sintering apparatus comprises a reaction chamber (300) for accommodating the gel tube, sealed under a vacuum condition; a vacuum pump (330) for adjusting a degree of vacuum inside the reaction chamber according to a control signal; a vacuum gauge (302) for measuring the degree of vacuum inside the reaction chamber; a movable part (320) for supporting the gel tube and for rotating and vertically moving the gel tube according to the control signal; a temperature sensor (303) for measuring a temperature inside the reaction chamber; a heater (301) for adjusting the temperature inside of the reaction chamber according to the control signal so as to sinter the gel tube; and, a controller (340) for controlling the vacuum pump, the heater, and the movable part so as to sinter the gel tube under the vacuum condition. The method comprises the steps of sintering the gel tube under a vacuum condition while being rotated and moved vertically to increase diffusion rate of gas remaining in the tube. <IMAGE>
申请公布号 EP1418159(A2) 申请公布日期 2004.05.12
申请号 EP20030025463 申请日期 2003.11.06
申请人 SAMSUNG ELECTRONICS CO. LTD. 发明人 SON, WEON-JUNG;PARK, YON-YONG;BAIK, YOUNG-MIN;OH, JEONG-HYUN
分类号 C03B8/02;C03B19/12;C03B37/016;(IPC1-7):C03B19/12 主分类号 C03B8/02
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