CHEMICAL MECHANICAL POLISHING PAD HAVING HOLES AND/OR GROOVES,申请号EP20010963600-传众专利搜索

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发明名称	CHEMICAL MECHANICAL POLISHING PAD HAVING HOLES AND/OR GROOVES
摘要
申请公布号	EP1417703(A1)	申请公布日期	2004.05.12
申请号	EP20010963600	申请日期	2001.08.29
申请人	SKC CO., LTD.	发明人	PARK, IN-HA;KIM, JAE-SEOK;KWON, TAE-KYOUNG
分类号	B24B37/00;B24B37/04;B24D13/14;H01L21/304;H01L21/306;(IPC1-7):H01L21/304	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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