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发明名称
PROCESS FOR ASHING AN ORGANIC FILM FROM A SUBSTRATE
摘要
申请公布号
IL137513(A)
申请公布日期
2004.05.12
申请号
IL19990137513
申请日期
1999.01.26
申请人
ANON, INC.
发明人
分类号
G03F7/42;H01L21/302;H01L21/3065;H01L21/311;H05K3/26;(IPC1-7):H01L25/302
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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